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Characterization and design evaluation of membrane-based calorimetric MEMS sensors for two-dimensional flow measurement

Authors

Hartgenbusch, N.
Borysov, M.
Jedermann, R.
Lang, W.

Meta information [BibTeX]

Year: 2020, Reviewed
In: IEEE Sensors Journal
Volume 20, Issue 9
Pages: 4602-4609
DOI: 10.1109/JSEN.2020.2965332

Hartgenbusch, N.; Borysov, M.; Jedermann, R.; Lang, W.
Characterization and design evaluation of membrane-based calorimetric MEMS sensors for two-dimensional flow measurement
In: IEEE Sensors Journal, 20(2020)9, pp. 4602-4609
(Workgroup: IMSAS)

@article{Har20a,
author = {Hartgenbusch, N. and Borysov, M. and Jedermann, R. and Lang, W.},
title = {Characterization and design evaluation of membrane-based calorimetric MEMS sensors for two-dimensional flow measurement},
journal = {IEEE Sensors Journal},
year = {2020},
volume = {20},
number = {9},
doi = {10.1109/JSEN.2020.2965332},
pages = {4602-4609}
}

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Contributions to Journals

Characterization and design evaluation of membrane-based calorimetric MEMS sensors for two-dimensional flow measurement

Authors

Meta information [BibTeX]